Ultraprecision Positioning by New Type of Linear Motor Drive
نویسندگان
چکیده
منابع مشابه
Precision Motion Control of Linear Motor Drive Systems for Micro/nano-positioning
Micro and Nano-technologies need precision machines that can produce motion accuracy down to micro/nano-meter range. At the same time, these machines have to operate at high speeds to yield high productivity. Such an increasingly tight control performance requirement puts a significant challenge to control community and forces control engineers to look beyond traditional linear control theory f...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2010
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.76.1364